Method of and system for measurement of direction of surface and

Details Method of and system for measurement of direction of surface and Method of and system for measurement of direction of surface and

1995-03-17

1996-09-17

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356360, 356361, G01B 902

Patent

active

055574084

ABSTRACT:
A main measuring light having a first wavelength is projected onto a work and a reference surface to produce first interference fringes and a determination light having a second wavelength slightly different from the first wavelength is projected onto the work and the reference surface to produce second interference fringes. Whether the surface of the work is concave or convex, in which direction the surface inclines or the refractive index distribution of the work is determined on the basis of the relative positions of the first and second interference fringes.

REFERENCES:
patent: 4632554 (1986-12-01), Pearce
patent: 4759628 (1988-07-01), Tatsuno et al.
patent: 5129724 (1992-07-01), Brophy et al.

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