Stage apparatus, method for controlling the same, exposure...

Details Stage apparatus, method for controlling the same, exposure... Stage apparatus, method for controlling the same, exposure...

2007-03-19

2010-06-15

Glick, Edward J (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S075000, C318S632000, C318S649000, C310S012010, C310S012060

Reexamination Certificate

active

07738080

ABSTRACT:
A stage apparatus includes a base, a stage that can move on a surface of the base, a first imparting unit arranged inside the base, which has a mass body and an actuator that is fixed to the base and moves the mass body in a direction vertical to the surface, the first imparting unit being configured to apply a force to the base by moving the mass body, and a controlling unit that controls the movement of the mass body in the vertical direction in the first imparting unit in accordance with movement of the stage, so that a force, which is generated in the base by the movement of the stage in a rotational direction around an axis parallel to the surface, is reduced.

REFERENCES:
patent: 5172160 (1992-12-01), Van Eijk et al.
patent: 5260580 (1993-11-01), Itoh et al.
patent: 5684856 (1997-11-01), Itoh et al.
patent: 6072183 (2000-06-01), Itoh et al.
patent: 6414742 (2002-07-01), Korenaga et al.
patent: 6504160 (2003-01-01), Itoh et al.
patent: 2002/0104950 (2002-08-01), Mayama
patent: 2005/0156552 (2005-07-01), Sekiguchi
patent: 2005/0254036 (2005-11-01), Sasaki et al.
patent: 2006/0017908 (2006-01-01), Mayama
patent: 2006/0082754 (2006-04-01), Sasaki et al.
patent: 5-077126 (1993-03-01), None
patent: 5-121294 (1993-05-01), None
patent: 11-190786 (1999-07-01), None
patent: 2005354022 (2005-12-01), None

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