Electric heating – Metal heating – By arc
Reexamination Certificate
2006-12-19
2010-10-19
Hoang, Tu B (Department: 3742)
Electric heating
Metal heating
By arc
C219S121600, C219S121670, C219S121680, C219S121690, C219S121840
Reexamination Certificate
active
07816626
ABSTRACT:
The invention is directed to a method in which disks, particularly wafers, of brittle material are severed along planned severing lines by a laser by introducing thermal stresses. The temperature gradient required for this and the compressive stresses and tensile stresses resulting from it are generated in that the disk is first cooled proceeding from its underside at least along the planned severing lines toward the upper side of the disk, and the upper side of the disk is then acted upon by a laser beam along the planned severing lines. The description also relates to an apparatus for carrying out the method.
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Machine Translation of JP-2004-025187.
Machine Translation of DE 102 35 234.
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Eberhardt Gabriele
Grieger Jan
Zuehlke Hans-Ulrich
Frommer & Lawrence & Haug LLP
Hoang Tu B
Jennison Brian
JENOPTIK Automatisierungstechnik GmbH
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