Imaging device and method for a bonding apparatus

Details Imaging device and method for a bonding apparatus Imaging device and method for a bonding apparatus

2008-06-06

2010-12-07

Harrington, Alicia M (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

Reexamination Certificate

active

07848022

ABSTRACT:
An imaging device and method of a bonding apparatus in which the imaging device includes: a high-magnification optical system having first and second high-magnification optical paths that extend to multiple imaging planes through a high-magnification lens and have different optical path lengths from the high-magnification lens to the respective imaging planes correspondingly to multiple subject imaging ranges which are at different distances from the high-magnification lens; and a low-magnification optical system having a low-magnification optical path that extends to an imaging plane through a low-magnification lens and having a field of view wider than those of the high-magnification optical paths. The imaging elements on the respective imaging planes in the high-magnification optical system are adapted to image semiconductor chips, while the imaging element on the imaging plane in the low-magnification optical system is adapted to image a lead frame.

REFERENCES:
patent: 02-301148 (1990-12-01), None
patent: 05-332739 (1993-12-01), None
patent: 3272640 (2002-04-01), None

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