Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2005-12-29
2010-02-02
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S053000
Reexamination Certificate
active
07656506
ABSTRACT:
A substrate handler for moving a substrate relative to a substrate table of a lithographic apparatus. The substrate handler comprises at least one support surface or platform adapted to carry a plurality of independent substrates simultaneously. The substrate handler adapted to load substrates onto and unload substrates from the substrate table before and after exposure.
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Jacobs Hernes
Luttikhuis Bernardus Antonius Johannes
Van Der Schoot Harmen Klaas
Vosters Petrus Matthijs Henricus
ASML Netherlands B.V.
Nguyen Hung Henry
Sterne, Kessler, Goldstein & Fox P.L.L.C
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