Retainer ring and polishing machine

Details Retainer ring and polishing machine Retainer ring and polishing machine

2008-03-24

2010-10-26

Rose, Robert (Department: 3727)

Abrading

Machine

Rotary tool

C451S398000

Reexamination Certificate

active

07819723

ABSTRACT:
To provide a retainer ring by which an object to be polished can be uniformly polished, and deterioration thereof can be suppressed, and it does not take time to recycle, and a polishing machine having the retainer ring. The retainer ring1includes: a first annular portion11for surrounding an outer circumferential portion of the object to be polished and made of resin; and a second annular portion12provided on the first annular portion11and having a mechanical strength higher than that of the first annular portion11. In rim portions of the first annular portion11and the second annular portion12, a fixing portion13for fixing the first annular portion11and the second annular portion12with mechanical joining is provided. The first annular portion11protrudes beyond the fixing portion13toward the opposite side of the second annular portion12.

REFERENCES:
patent: 6354927 (2002-03-01), Natalicio
patent: 6390904 (2002-05-01), Gleason et al.
patent: 6585850 (2003-07-01), Kenji et al.
patent: 6824458 (2004-11-01), Ensinger
patent: 7044838 (2006-05-01), Maloney et al.
patent: 7503837 (2009-03-01), Oh et al.
patent: 2005/0277375 (2005-12-01), Young
patent: 11-291162 (1999-10-01), None

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