Metal-assisted DBRs for thermal management in VCSELs

Details Metal-assisted DBRs for thermal management in VCSELs Metal-assisted DBRs for thermal management in VCSELs

2004-12-30

2010-12-28

Harvey, Minsun (Department: 2828)

Coherent light generators

Particular resonant cavity

Specified cavity component

C372S043010, C372S046012, C372S050124, C372S096000, C372S098000, C257S098000, C257SE33069, C257SE33072, C257SE51021

Reexamination Certificate

active

07860143

ABSTRACT:
A VCSEL includes a substrate having a partially removed portion; a metal-assisted DBR having a metal layer and a first mirror stack, wherein the metal layer is located at the partially removed portion of the substrate; an active region having a plurality of quantum wells over the metal-assisted DBR; and a second mirror stack over the active region, wherein a number of alternating layers of the first mirror stack is substantially smaller than a number typically required for a VCSEL without the integrated metal reflector. Such a metal-assisted DBR is especially useful for a long-wavelength VCSEL on a InP substrate or a red-color VCSEL on a GaAs substrate.

REFERENCES:
patent: 4943970 (1990-07-01), Bradley
patent: 5363393 (1994-11-01), Uomi et al.
patent: 5365540 (1994-11-01), Yamanaka
patent: 5422901 (1995-06-01), Lebby et al.
patent: 5491710 (1996-02-01), Lo
patent: 5818862 (1998-10-01), Salet
patent: 5991326 (1999-11-01), Yuen et al.
patent: 6046065 (2000-04-01), Goldstein et al.
patent: 6339496 (2002-01-01), Koley et al.
patent: 6534331 (2003-03-01), Liao et al.
patent: 6549553 (2003-04-01), Uenohara et al.
patent: 6697413 (2004-02-01), Hwang et al.
patent: 6852557 (2005-02-01), Shieh
patent: 7136406 (2006-11-01), Ryou
patent: 2004/0042518 (2004-03-01), Tatum et al.
patent: 2005/0094695 (2005-05-01), Trezza et al.
patent: 2006/0029112 (2006-02-01), Young et al.
patent: 98/07218 (1998-02-01), None
patent: 02/17445 (2002-02-01), None
A. Bhattacharyya et al “High reflectivity and crack-free AIGaN/AIN ultraviolet distributed Bragg reflectors” American Vacuum Society, J. Vac. Sci Technol. B 20(3), May/Jun. 2002.
Wipiejewski, et al.,Improved Performance of Vertical-Cavity Surface-Emitting Laser Diodes with Au-Plated Heat Spreading Layer, Electronics Letters, vol. 31, No. 4, Feb. 16, 1995, pp. 279-280.
Kotaki, et al.,GaInAsP/InP Surface Emitting Laser with Two Active Layers, Extended Abstracts of the 16thConference on Solid State Devices and Materials, Kobe, 1984, pp. 133-136.
U.S. Appl. No. 11/026,397, filed Dec. 30, 2004, entitled “InAlAs Having Enhanced Oxidation Rate Grown Under Very Low V/III Ratio.”

Affiliated with

Also associated with

Rating

Metal-assisted DBRs for thermal management in VCSELs does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Metal-assisted DBRs for thermal management in VCSELs, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Metal-assisted DBRs for thermal management in VCSELs will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4171514