Support for acoustic resonator and corresponding integrated...

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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C310S335000, C257S415000, C257S690000, C257S698000, C257S734000, C257S774000

Reexamination Certificate

active

07737804

ABSTRACT:
An integrated circuit includes at least one interconnection level and an acoustic resonator provided with an active element and a support. The includes at least one bilayer assembly having a layer of high acoustic impedance material and a layer of low acoustic impedance material. The support further includes a protruding element arranged on a metallization level of the interconnection level, making it possible to produce an electrical contact between an interconnection level and the active element of the acoustic resonator.

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