Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2008-06-03
2010-11-23
SanMartin, J. (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C181S171000, C181S172000, C381S429000, C310S324000, C310S338000, C310S345000
Reexamination Certificate
active
07839052
ABSTRACT:
A sensing membrane applied to a micro-electro-mechanical system (MEMS) device includes a body, a stress releasing structure and a connecting portion. The stress releasing structure for releasing a membrane residual stress surrounds the body. The stress releasing structure has several first perforations and several second perforations. The first perforations are located between the body and the second perforations. The connecting portion connects the stress releasing structure and a substrate of the MEMS device.
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“A Novel Capacitive Type Miniature Microphone with a Flexure Hinge Diaphragm” Hye Jin Kim et al.; Optomechatronic Actuators, Manipulation, and Systems Control; Proc. Of SPIE vol. 6374, 63740H (2006).
English Abstract of EP0758080 (Feb. 12, 1997).
Chen Jien-Ming
Wu Chia-Yu
Industrial Technology Research Institute
SanMartin J.
Thomas Kayden Horstemeyer & Risley
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