Substrate measuring method, computer-readable recording...

Details Substrate measuring method, computer-readable recording... Substrate measuring method, computer-readable recording...

2007-10-09

2010-10-26

Bui, Bryan (Department: 2863)

Data processing: measuring, calibrating, or testing

Testing system

Of circuit

C438S014000, C700S108000

Reexamination Certificate

active

07822574

ABSTRACT:
In the present invention, substrates in a plurality of lots are successively processed in a coating and developing treatment system, and line width measurement is performed for some of substrates of the substrate which have been through processing in each lot. The line width measurement of two successive lots is performed such that the last line width measurement in the previous lot of the two successive lots has been completed at the time of completion of processing of a substrate which is first subjected to the line width measurement in the subsequent lot. According to the present invention, the measurement of product substrates can be performed without decreasing the throughput of the product substrates.

REFERENCES:
patent: 6963789 (2005-11-01), Bun et al.
patent: 7296103 (2007-11-01), Purdy et al.
patent: 2004/0044435 (2004-03-01), Hellig et al.
patent: 2003-209093 (2003-07-01), None
patent: 2006-128572 (2006-05-01), None

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