Optical scanner with improved scan time

Details Optical scanner with improved scan time Optical scanner with improved scan time

2007-04-10

2010-11-09

Allen, Stephone B (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S221200, C359S226200, C359S212100

Reexamination Certificate

active

07830575

ABSTRACT:
A method and apparatus is provided for scanning an object, featuring scanning an incident beam in a substantially curved scan pattern; and moving an object at a predetermined rate along an axis substantially orthogonal to a plane of the curved scan pattern so that a two dimensional image can be formed by successive passes of a circularly scanned spot. In particular, a laser beam scans around an objective lens at a fixed radius RLwith a fixed input angle θd. When scanned in this manner, the laser beam before the objective lens forms a “cone” of directions (so herein it is referred to as a “conical scan”). Scanning in this fashion produces the curved scan pattern at the object (substrate). By moving the object (substrate) at the predetermined rate along the axis orthogonal to the plane of the curved scan pattern, the two dimensional image can be formed by successive passes of the circularly scanned spot.

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