Method and apparatus for reviewing defects

Details Method and apparatus for reviewing defects Method and apparatus for reviewing defects

2005-12-20

2010-02-02

Desire, Gregory M (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C356S237400, C356S237500, C382S149000, C382S218000

Reexamination Certificate

active

07657078

ABSTRACT:
An apparatus for reviewing defects including an image processing section (defect classification device section) with a function of estimating a non-defective state (reference image) of a portion in which the defect exists by use of a defect image, and a function of judging criticality or non-flat state of the defect by use of the estimation result. It becomes possible to establish both of a high-throughput image collecting sequence in which any reference image is not acquired and high-precision defect classification, and then to realize both of a high performance classifying function and a high-throughput image collecting function in a defect reviewing apparatus which automatically collects and classifies images of defects existing on a sample of a semiconductor wafer or the like.

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