Self-bias measuring method, apparatus thereof and electrostatic

Details Self-bias measuring method, apparatus thereof and electrostatic Self-bias measuring method, apparatus thereof and electrostatic

1994-05-09

1996-09-17

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

G01R 3126

Patent

active

055572154

ABSTRACT:
According to the present invention, there are provided a self-bias measurement method of measuring the self-bias voltage of an object when the object is subjected to a plasma process by using a plasma generated between a pair of electrodes, the object being held, by means of electrostatic chucking means having an electrostatic chucking electrode, on one of the pair of electrodes situated in a processing chamber, the method including the steps of detecting a leak current between the object and the electrostatic chucking electrode while varying the DC voltage applied to the electrostatic chucking electrode, and calculating the self-bias voltage of the object on the basis of the leak current detected, an apparatus for measuring the self-bias, and an electrostatic chucking apparatus having means capable of measuring the self-bias.

REFERENCES:
patent: 4968374 (1990-11-01), Tsukada
patent: 5167748 (1992-12-01), Hall

Affiliated with

Also associated with

Rating

Self-bias measuring method, apparatus thereof and electrostatic does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Self-bias measuring method, apparatus thereof and electrostatic , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Self-bias measuring method, apparatus thereof and electrostatic will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-415827