Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-03-28
2010-06-22
Mack, Ricky L (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000, C359S224200
Reexamination Certificate
active
07742220
ABSTRACT:
A microelectromechanical system (MEMS) device includes a reflective element that includes at least one stop member. The device also includes an electrode and an aperture that extends at least partially through the electrode. The aperture has a boundary. The device has an electrically nonconductive surface within the aperture or on a portion of the boundary of the aperture. A support structure separates the reflective element from the electrode. The reflective element can be moved between a first position and a second position. The stop member is spaced from the electrically nonconductive surface when the reflective element is in the first position. A portion of the stop member is in contact with the electrically nonconductive surface when the reflective element is in the second position. The reflective element and the electrode are electrically isolated from each other when the reflective element is in the second position.
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Kogut Lior
Tung Ming-Hau
Knobbe Martens Olson & Bear LLP
Mack Ricky L
QUALCOMM MEMS Technologies Inc.
Tra Tuyen Q
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