Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2005-01-13
2010-02-02
Hepperle, Stephen (Department: 3753)
Measuring and testing
Volume or rate of flow
Thermal type
C137S487500
Reexamination Certificate
active
07654137
ABSTRACT:
The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed.More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate, a mass flow rate sensor part comprising a corrosion resistant metal substrate, a thin film forming a temperature sensor and a heater mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part comprising a thin film forming a strain sensor element mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and the sensor is so constituted that the mass flow rate and pressure of the fluid are measured.
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International Search Report, Issued in the Corresponding International Application PCT/JP2005/000266, Completed Feb. 1, 2005 and Mailed Apr. 25, 2005.
Dohi Ryousuke
Hirata Kaoru
Ikeda Nobukazu
Nishino Kouji
Fujikin Incorporated
Griffin & Szipl, P.C.
Hepperle Stephen
McCalister William
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