Method and apparatus for evaluating semiconductor layers

Details Method and apparatus for evaluating semiconductor layers Method and apparatus for evaluating semiconductor layers

2006-07-14

2010-02-02

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

C356S445000

Reexamination Certificate

active

07656514

ABSTRACT:
A method for evaluating semiconductor layers includes irradiating semiconductor layers on a substrate with light; measuring an optical spectrum peculiar to excitons in the semiconductor layers; and analyzing a broadening factor of optical spectral features of the optical spectrum. The method provides a quick measurement of a surface state of the semiconductor layers with high accuracy.

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Shen, H.; “Franz-Keidysh oscillations in modulation spectroscopy”, J.Applied Physics, vol. 78, No. 4, pp. 2151-2176 (Aug. 15, 1995).

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