Spray pyrolysis for large-scale production of chalcopyrite...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material

Reexamination Certificate

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Reexamination Certificate

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07838403

ABSTRACT:
Techniques for fabricating a photovoltaic device having a chalcopyrite absorber layer, such as a copper indium gallium selenide/sulfide (CIGSS) absorber layer, are provided. In one aspect, a method for fabricating a photovoltaic device is provided. The method includes the following steps. A precursor solution of metal chalcogenide dissolved in hydrazine or a hydrazine-like solvent is formed. Spray pyrolysis in an inert environment is used to deposit the precursor solution onto a substrate to form a metal chalcogenide layer on the substrate. A buffer layer is formed adjacent to a side of the metal chalcogenide layer opposite the substrate. A transparent conductive contact is formed adjacent to a side of the buffer layer opposite the metal chalcogenide layer.

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