Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2004-05-26
2009-06-09
Hassanzadeh, Parviz (Department: 1792)
Coating apparatus
Gas or vapor deposition
With treating means
Reexamination Certificate
active
07543546
ABSTRACT:
A plasma treatment apparatus is provided, which enables to increase a treatment area and provide good treatment uniformity. This apparatus comprises a pair of electrode plates having a plurality of through holes and an insulating plate having a plurality of through holes. The insulating plate is disposed between the electrode plates such that positions of the through holes of the electrode plates correspond to the positions of the through holes of the insulating plate. A plurality of discharge spaces are formed by the through holes of the electrode plates and the through holes of the insulating plate. By applying a voltage between the electrode plates, while supplying a plasma generation gas into the discharge spaces, plasmas are generated simultaneously in the discharge spaces, and sprayed on an object to efficiently perform a large-area, uniform plasma treatment.
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Sawada Yasushi
Shibata Tetsuji
Taguchi Noriyuki
Yamazaki Keiichi
Cheng Law Group PLLC
Crowell Michelle
Hassanzadeh Parviz
Matsushita Electric & Works Ltd.
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