Thin-film piezoelectric resonator and filter circuit

Details Thin-film piezoelectric resonator and filter circuit Thin-film piezoelectric resonator and filter circuit

2006-12-28

2009-06-23

Dougherty, Thomas M (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S349000, C310S351000, C310S366000, C310S369000

Reexamination Certificate

active

07550904

ABSTRACT:
A thin-film piezoelectric resonator has a piezoelectric film which is formed via a space on a substrate and is supported on the substrate at least one location, an upper electrode which has a plurality of electrode layers and a connection part connecting the electrode layers to each other, each of the electrode layers being formed on the piezoelectric film, having the same width and being arranged at the same interval as the width, a lower electrode formed under the piezoelectric film, a first pad which is formed on the substrate and is electrically connected to the upper electrode, and a second pad which is formed on the substrate and is electrically connected to the lower electrode.

REFERENCES:
patent: 3114849 (1963-12-01), Poschenrieder
patent: 3453458 (1969-07-01), Smith et al.
patent: 4453242 (1984-06-01), Toda
patent: 5552655 (1996-09-01), Stokes et al.
patent: 6323580 (2001-11-01), Bernstein
patent: 6813928 (2004-11-01), Blakley
patent: 2003/0173873 (2003-09-01), Bryant et al.
patent: 07-147526 (1995-06-01), None
Piazza et al.; “Single-Chip Multiple-Frequency Filters Based on Contour-Mode Aluminum Nitride Piezoelectric Micromechanical Resonators”; The 13thInternational Conference Solid-State Sensors, Actuators and Microsystems, Seoul, Korea.; Jun. 5-9, 2005; pp. 2065-2068.

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