Method for making a device

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S417000, C029S603140, C029S603150, C029S603160, C029S603180, C216S062000, C216S065000, C216S066000, C360S244400, C360S245300, C360S294400, C451S005000, C451S041000

Reexamination Certificate

active

07617588

ABSTRACT:
Methods for making devices comprise forming a plurality of transducers on a major surface of a wafer, including forming a plurality of solid layers each having a thickness that is less than one micron; dividing the wafer and the attached transducers into a plurality of units such that each of the units includes a portion of the layers and a substantially planar surface that is substantially perpendicular to the portion of the layers; and removing at least part of the substantially planar surface, including creating, for each transducer, at least one flexible element that is attached the transducer. Conventional problems of connecting a head to the flexure and/or gimbal are eliminated. The heads can be made thinner than is conventional and gimbals and flexures can be more closely aligned with forces arising from interaction with the media surface and from seeking various tracks, reducing torque and dynamic instabilities.

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Shuyun Wu et al., “Silicon micromachined integrated suspension systems for magnetic disk drives,” Sensors and Actuators A 55 (1996) pp. 195-200.

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