Gas separation – Combined or convertible – In environmental air enclosure
Reexamination Certificate
2006-09-12
2009-02-03
Smith, Duane (Department: 1797)
Gas separation
Combined or convertible
In environmental air enclosure
C055S420000, C055S424000, C055S467000, C055S485000, C055S486000, C096S417000, C096S418000, C454S187000, C454S228000, C454S230000, C454S233000, C454S236000, C422S122000, C422S177000
Reexamination Certificate
active
07485169
ABSTRACT:
A semiconductor manufacturing process facility requiring use therein of air exhaust for its operation, such facility including clean room and gray room components, with the clean room having at least one semiconductor manufacturing tool therein, and wherein air exhaust is flowed through a region of the clean room. The facility includes an air exhaust treatment apparatus arranged to (i) receive air exhaust after flow thereof through said region of said clean room, (ii) produce a treated air exhaust, and (iii) recirculate the treated air exhaust to an ambient air environment in the facility, e.g., to the gray room of the facility.
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Olander W. Karl
Sweeney Joseph D.
Wang Luping
Advanced Technology & Materials Inc.
Chappuis Maggie
Hultquist Steven J.
Intellectual Property / Technology Law
Pham Minh-Chau T.
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