Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-11-29
2009-06-02
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07542148
ABSTRACT:
A method capable of accurately measuring a physical quantity of a measurement object in a substrate processing apparatus. In a temperature measurement apparatus for implementing the method, two interference positions are measured at different timings when a reference mirror is caused to move in the direction away from a collimator fiber, and a difference between the two interference positions is calculated. When the reference mirror remote from the collimator fiber is caused to move toward the collimator fiber, two interference positions are measured at different timings, and a difference between the two interference positions is calculated. An average value of the interference position differences is calculated, an optical path length difference is determined from the average value, and a wafer temperature is calculated from the optical path length difference.
REFERENCES:
patent: 3551051 (1970-12-01), Salgo
patent: 5633715 (1997-05-01), Ai et al.
patent: 5907403 (1999-05-01), Andrews et al.
patent: 6078706 (2000-06-01), Nau et al.
patent: 6842254 (2005-01-01), Van Neste et al.
patent: 7099015 (2006-08-01), Melnyk
patent: 7286237 (2007-10-01), Grossman et al.
patent: 7324210 (2008-01-01), De Groot et al.
patent: 7416330 (2008-08-01), Ito et al.
patent: 2002/0085208 (2002-07-01), Hauger et al.
patent: 2002/0135774 (2002-09-01), De Groot
patent: 2002/0159671 (2002-10-01), Boyd et al.
patent: 2005/0078318 (2005-04-01), De Groot
patent: 2005/0151975 (2005-07-01), Melnyk
patent: 2005/0259716 (2005-11-01), Ito et al.
patent: 2003-307458 (2003-10-01), None
Lenovo Support & downloads—Overview—ThinkPad X31, Sep. 23, 2005, accessed from http://www.ibm.com on Aug. 12, 2008.
Carla Thornton, “IBM ThinkPad X31,” Dec. 22, 2003, About.com, accessed http://pcworld.about.com
ews/Dec222003id113971.htm on Aug. 12, 2008.
Koshimizu Chishio
Suzuki Tomohiro
Lyons Michael A
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Richey Scott M
Tokyo Electron Limited
LandOfFree
Method for measuring physical quantity of measurement object... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for measuring physical quantity of measurement object..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for measuring physical quantity of measurement object... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4139731