Magnetic bearing device and vacuum pump

Details Magnetic bearing device and vacuum pump Magnetic bearing device and vacuum pump

2004-09-02

2009-12-15

Lam, Thanh (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Rotary

C310S06800R

Reexamination Certificate

active

07633201

ABSTRACT:
A magnetic bearing device (1) for rotatably supporting a shaft (20) for rotation about a rotation axis (101) is disclosed. The device (1) comprises a first active radial bearing (5), one or more first radial displacement sensors (81), and an axial bearing (6, 7). At least a part of the axial bearing (6, 7) is disposed between the first active radial bearing (5) and the first radial displacement sensors (81) when viewed in an orthogonal projection onto the rotation axis (101). A vacuum pump including the magnetic bearing device (1) and a multiple-sensing unit (8) are also disclosed.

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