Radiant energy – Ion generation – Electron bombardment type
Reexamination Certificate
2005-04-08
2009-06-09
Berman, Jack I (Department: 2881)
Radiant energy
Ion generation
Electron bombardment type
C250S42300F, C250S424000, C313S153000, C313S160000, C315S085000
Reexamination Certificate
active
07544952
ABSTRACT:
A multicharged ions generating source that is easy to manufacture, excellent in controllability and maintainability, high in degree of ionization and large in beam intensity and a charged particle beam apparatus using the same are disclosed. The multicharged ions generating source includes an ion source electrode (3) comprising an electron source (4), a drift tube (5) that constitutes an ion trapping region and a collector (6), a superconducting magnet (11) for ion entrapment, an ion infeed means (20, 22), a first vacuum chamber (2) receiving the ion source electrode (3), a second vacuum chamber (10) receiving the superconducting magnet (11), and a vacuum pumping unit (15, 16) provided for each of the first and second vacuum chambers. The first and the second vacuum chambers (2) and (10) are made removable from each other, and only the ion source electrode (3) to be held at extremely high vacuum can be baked for degassing.
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Fukumoto Takunori
Mashiko Shinro
Nakajima Fumiharu
Nakamura Nobuyuki
Ohtani Shunsuke
Berman Jack I
Chen Yoshimura LLP
Japan Science and Technology Agency
Maskell Michael
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