Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate
2007-06-14
2009-12-01
Lee, Calvin (Department: 2892)
Semiconductor device manufacturing: process
Chemical etching
Vapor phase etching
C438S754000
Reexamination Certificate
active
07625825
ABSTRACT:
A method of making a microelectromechanical system (MEMS) device is disclosed. The method includes forming a stationary layer over a substrate. A sacrificial layer is formed over the stationary layer. The sacrificial layer is formed of a first material. A mechanical layer is formed over the sacrificial layer. A hard mask layer is formed over the mechanical layer. The hard mask layer is formed of a second material. The first and second materials are etchable by a single etchant which is substantially selective for etching the first and second materials relative to the mechanical layer. The hard mask layer is patterned after forming the hard mask layer. Subsequently, the mechanical layer is etched through the patterned hard mask layer. The patterned hard mask layer is removed simultaneously with the sacrificial layer after etching the mechanical layer.
REFERENCES:
patent: 3728030 (1973-04-01), Hawes
patent: 3955880 (1976-05-01), Lierke
patent: 4377324 (1983-03-01), Durand et al.
patent: 4482213 (1984-11-01), Piliavin et al.
patent: 4519676 (1985-05-01), te Velde
patent: 4786128 (1988-11-01), Birnbach
patent: 4790635 (1988-12-01), Apsley
patent: 4900136 (1990-02-01), Goldburt et al.
patent: 4965562 (1990-10-01), Verhulst
patent: 5022745 (1991-06-01), Zahowski et al.
patent: 5044736 (1991-09-01), Jaskie et al.
patent: 5075796 (1991-12-01), Schildkraut et al.
patent: 5099353 (1992-03-01), Hornbeck
patent: 5124834 (1992-06-01), Cusano et al.
patent: 5168406 (1992-12-01), Nelson
patent: 5172262 (1992-12-01), Hornbeck
patent: 5192395 (1993-03-01), Boysel et al.
patent: 5212582 (1993-05-01), Nelson
patent: 5226099 (1993-07-01), Mignardi et al.
patent: 5231532 (1993-07-01), Magel et al.
patent: 5293272 (1994-03-01), Jannson et al.
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5312512 (1994-05-01), Allman et al.
patent: 5345328 (1994-09-01), Fritz et al.
patent: 5347377 (1994-09-01), Revelli, Jr. et al.
patent: 5381232 (1995-01-01), van Wijk
patent: 5489952 (1996-02-01), Gove et al.
patent: 5500761 (1996-03-01), Goossen et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5552924 (1996-09-01), Tregilgas
patent: 5559358 (1996-09-01), Burns et al.
patent: 5578976 (1996-11-01), Yao
patent: 5608468 (1997-03-01), Gove et al.
patent: 5619059 (1997-04-01), Li et al.
patent: 5619365 (1997-04-01), Rhoades et al.
patent: 5619366 (1997-04-01), Rhoads et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5638946 (1997-06-01), Zavracky
patent: 5710656 (1998-01-01), Goossen
patent: 5739945 (1998-04-01), Tayebati
patent: 5745281 (1998-04-01), Yi et al.
patent: 5771321 (1998-06-01), Stern
patent: 5784189 (1998-07-01), Bozler et al.
patent: 5822110 (1998-10-01), Dabbaj
patent: 5825528 (1998-10-01), Goossen
patent: 5867302 (1999-02-01), Fleming et al.
patent: 5896796 (1999-04-01), Chih
patent: 5914803 (1999-06-01), Hwang et al.
patent: 5920421 (1999-07-01), Choi
patent: 5943155 (1999-08-01), Goossen
patent: 5943158 (1999-08-01), Ford et al.
patent: 5959763 (1999-09-01), Bozler et al.
patent: 5972193 (1999-10-01), Chou et al.
patent: 5978127 (1999-11-01), Berg
patent: 5986796 (1999-11-01), Miles
patent: 6028690 (2000-02-01), Carter et al.
patent: 6031653 (2000-02-01), Wang
patent: 6040937 (2000-03-01), Miles
patent: 6097145 (2000-08-01), Kastalsky et al.
patent: 6104525 (2000-08-01), Min
patent: 6170332 (2001-01-01), MacDonald et al.
patent: 6201633 (2001-03-01), Peeters et al.
patent: 6249039 (2001-06-01), Harvey et al.
patent: 6282010 (2001-08-01), Sulzbach et al.
patent: 6288824 (2001-09-01), Kastalsky et al.
patent: 6295154 (2001-09-01), Laor et al.
patent: 6324192 (2001-11-01), Tayebati
patent: 6327071 (2001-12-01), Kimura et al.
patent: 6351329 (2002-02-01), Greywall
patent: 6391675 (2002-05-01), Ehmke et al.
patent: 6407851 (2002-06-01), Islam et al.
patent: 6447126 (2002-09-01), Hornbeck
patent: 6449084 (2002-09-01), Guo
patent: 6466354 (2002-10-01), Gudeman
patent: 6473072 (2002-10-01), Comiskey et al.
patent: 6513911 (2003-02-01), Ozaki et al.
patent: 6522801 (2003-02-01), Aksyuk et al.
patent: 6537427 (2003-03-01), Raina
patent: 6577785 (2003-06-01), Spahn et al.
patent: 6597490 (2003-07-01), Tayebati
patent: 6602791 (2003-08-01), Ouellet et al.
patent: 6625047 (2003-09-01), Coleman, Jr.
patent: 6642913 (2003-11-01), Kimura et al.
patent: 6653997 (2003-11-01), Van Gorkom et al.
patent: 6674562 (2004-01-01), Miles
patent: 6680792 (2004-01-01), Miles
patent: 6704475 (2004-03-01), Jin et al.
patent: 6710908 (2004-03-01), Miles et al.
patent: 6760146 (2004-07-01), Ikeda et al.
patent: 6778728 (2004-08-01), Taylor
patent: 6803534 (2004-10-01), Chen et al.
patent: 6859301 (2005-02-01), Islam et al.
patent: 6881535 (2005-04-01), Yamaguchi
patent: 6940631 (2005-09-01), Ishikawa
patent: 6958847 (2005-10-01), Lin
patent: 6980350 (2005-12-01), Hung et al.
patent: 6982820 (2006-01-01), Tsai
patent: 6987432 (2006-01-01), Lutz et al.
patent: 6995890 (2006-02-01), Lin
patent: 7006272 (2006-02-01), Tsai
patent: 7016095 (2006-03-01), Lin
patent: 7016099 (2006-03-01), Ikeda et al.
patent: 7027202 (2006-04-01), Hunter et al.
patent: 7041571 (2006-05-01), Strane
patent: 7042619 (2006-05-01), McGinley et al.
patent: 7042643 (2006-05-01), Miles et al.
patent: 7110158 (2006-09-01), Miles
patent: 7119945 (2006-10-01), Kothari et al.
patent: 7123216 (2006-10-01), Miles
patent: 7161730 (2007-01-01), Floyd
patent: 7193768 (2007-03-01), Lin
patent: 7233029 (2007-06-01), Mochizuki
patent: 7289259 (2007-10-01), Chui et al.
patent: 7321457 (2008-01-01), Heald
patent: 7417784 (2008-08-01), Sasagawa et al.
patent: 2001/0003487 (2001-06-01), Miles
patent: 2001/0010953 (2001-08-01), Kang et al.
patent: 2001/0026951 (2001-10-01), Vergani et al.
patent: 2001/0028503 (2001-10-01), Flanders et al.
patent: 2001/0055208 (2001-12-01), Kimura
patent: 2002/0031155 (2002-03-01), Tayebati et al.
patent: 2002/0054422 (2002-05-01), Carr et al.
patent: 2002/0055253 (2002-05-01), Rudhard
patent: 2002/0075555 (2002-06-01), Miles
patent: 2002/0109899 (2002-08-01), Ohtaka et al.
patent: 2002/0110948 (2002-08-01), Huang et al.
patent: 2002/0131682 (2002-09-01), Nasiri et al.
patent: 2002/0135857 (2002-09-01), Fitzpatrick et al.
patent: 2002/0141690 (2002-10-01), Jin et al.
patent: 2002/0146200 (2002-10-01), Kudrle et al.
patent: 2002/0149850 (2002-10-01), Heffner et al.
patent: 2002/0168136 (2002-11-01), Atia et al.
patent: 2002/0195681 (2002-12-01), Melendez et al.
patent: 2003/0015936 (2003-01-01), Yoon et al.
patent: 2003/0036215 (2003-02-01), Reid
patent: 2003/0053078 (2003-03-01), Missey et al.
patent: 2003/0072070 (2003-04-01), Miles
patent: 2003/0091072 (2003-05-01), Wang et al.
patent: 2003/0112096 (2003-06-01), Potter
patent: 2003/0119221 (2003-06-01), Cunningham et al.
patent: 2003/0123126 (2003-07-01), Meyer et al.
patent: 2003/0138213 (2003-07-01), Jin et al.
patent: 2003/0164350 (2003-09-01), Hanson et al.
patent: 2003/0201784 (2003-10-01), Potter
patent: 2003/0231373 (2003-12-01), Kowarz et al.
patent: 2004/0008396 (2004-01-01), Stappaerts
patent: 2004/0051929 (2004-03-01), Sampsell et al.
patent: 2004/0056742 (2004-03-01), Dabbaj
patent: 2004/0058532 (2004-03-01), Miles et al.
patent: 2004/0070813 (2004-04-01), Aubuchon
patent: 2004/0080035 (2004-04-01), Delapierre
patent: 2004/0080807 (2004-04-01), Chen et al.
patent: 2004/0100680 (2004-05-01), Huibers et al.
patent: 2004/0124073 (2004-07-01), Pillans et al.
patent: 2004/0125281 (2004-07-01), Lin
patent: 2004/0136045 (2004-07-01), Tran
patent: 2004/0136076 (2004-07-01), Tayebati
patent: 2004/0150869 (2004-08-01), Kasai
patent: 2004/0174583 (2004-09-01), Chen et al.
patent: 2004/0201908 (2004-10-01), Kaneko
patent: 2004/0207497 (2004-10-01), Hsu et al.
patent: 2004/0217919 (2004-11-01), Pichl et al.
patent: 2004/0226909 (2004-11-01), Tzeng
patent: 2004/0240032 (2004-12-01), Miles
patent: 2005/0024557 (2005-02-01), Lin
patent: 2005/0046919 (2005-03-01), Taguchi et al.
patent: 2005/0046922 (2005-03-01), Lin et al.
patent: 2005/0078348 (2005-04-01), Lin
patent: 2005/0128565 (2005-06-01), Ljungblad
patent: 2005/0195467 (2005-09-01), Kothari et al.
patent: 2005/0249966 (20
Knobbe Martens Olson & Bear LLP
Lee Calvin
QUALCOMM MEMS Technologies Inc.
LandOfFree
Method of patterning mechanical layer for MEMS structures does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of patterning mechanical layer for MEMS structures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of patterning mechanical layer for MEMS structures will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4128377