Ion sources, systems and methods

Radiant energy – Ion generation – Field ionization type

Reexamination Certificate

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C250S42300F, C250S426000, C250S492200, C250S492210

Reexamination Certificate

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07554096

ABSTRACT:
Ion sources, systems and methods are disclosed.

REFERENCES:
patent: 2893624 (1959-07-01), Fricke
patent: 3121155 (1964-02-01), Berry
patent: 3602710 (1971-08-01), Mueller
patent: 3868507 (1975-02-01), Panitz
patent: 4044255 (1977-08-01), Krisch et al.
patent: 4139773 (1979-02-01), Swanson
patent: 4236073 (1980-11-01), Martin
patent: 4255661 (1981-03-01), Liebl
patent: 4352985 (1982-10-01), Martin
patent: 4451737 (1984-05-01), Isakozawa
patent: 4467240 (1984-08-01), Futamoto et al.
patent: 4633084 (1986-12-01), Gruen et al.
patent: 4638209 (1987-01-01), Asamaki et al.
patent: 4639307 (1987-01-01), Goodrich
patent: 4649316 (1987-03-01), Cleaver et al.
patent: 4721878 (1988-01-01), Hagiwara et al.
patent: 4774414 (1988-09-01), Umemura et al.
patent: 4785177 (1988-11-01), Besocke
patent: 4874947 (1989-10-01), Ward et al.
patent: 4954711 (1990-09-01), Fink et al.
patent: 4983540 (1991-01-01), Yamaguchi et al.
patent: 4985634 (1991-01-01), Stengl et al.
patent: 5034612 (1991-07-01), Ward et al.
patent: 5059785 (1991-10-01), Doyle et al.
patent: 5063294 (1991-11-01), Kawata et al.
patent: 5083033 (1992-01-01), Komano et al.
patent: 5151594 (1992-09-01), McClelland
patent: 5188705 (1993-02-01), Swanson et al.
patent: 5324950 (1994-06-01), Otaka et al.
patent: 5414261 (1995-05-01), Ellisman et al.
patent: 5574280 (1996-11-01), Fujii et al.
patent: 5750990 (1998-05-01), Mizuno et al.
patent: 5783830 (1998-07-01), Hirose et al.
patent: 5976390 (1999-11-01), Muramatsu
patent: 5986270 (1999-11-01), Bormans et al.
patent: 6028953 (2000-02-01), Nakamura et al.
patent: 6042738 (2000-03-01), Casey et al.
patent: 6211527 (2001-04-01), Chandler
patent: 6268608 (2001-07-01), Chandler
patent: 6354438 (2002-03-01), Lee et al.
patent: 6395347 (2002-05-01), Adachi et al.
patent: 6414307 (2002-07-01), Gerlach et al.
patent: 6504151 (2003-01-01), Mitchell et al.
patent: 6538254 (2003-03-01), Tomimatsu et al.
patent: 6579665 (2003-06-01), Lee et al.
patent: 6581023 (2003-06-01), Kim
patent: 6700122 (2004-03-01), Matsui et al.
patent: 6753535 (2004-06-01), Rose
patent: 6791084 (2004-09-01), Shimoma et al.
patent: 6822245 (2004-11-01), Muto et al.
patent: 6875981 (2005-04-01), Nishikawa
patent: 7084399 (2006-08-01), Muto et al.
patent: 7119333 (2006-10-01), Herschbein et al.
patent: 7230244 (2007-06-01), Trotz et al.
patent: 7321118 (2008-01-01), Ward
patent: 7368727 (2008-05-01), Ward
patent: 7414243 (2008-08-01), Ward
patent: 2002/0134949 (2002-09-01), Gerlach et al.
patent: 2002/0144892 (2002-10-01), Lee et al.
patent: 2002/0170675 (2002-11-01), Libby et al.
patent: 2003/0047691 (2003-03-01), Musil et al.
patent: 2003/0062487 (2003-04-01), Hiroi et al.
patent: 2003/0174879 (2003-09-01), Chen
patent: 2004/0031936 (2004-02-01), Oi et al.
patent: 2004/0121069 (2004-06-01), Ferranti et al.
patent: 2005/0045821 (2005-03-01), Noji et al.
patent: 2006/0060777 (2006-03-01), Motoi et al.
patent: 2006/0097166 (2006-05-01), Ishitani et al.
patent: 2006/0197017 (2006-09-01), Motoi et al.
patent: 2006/0284091 (2006-12-01), Ward
patent: 2006/0284092 (2006-12-01), Ward
patent: 2007/0025907 (2007-02-01), Rezeq et al.
patent: 2007/0051900 (2007-03-01), Ward
patent: 2007/0138388 (2007-06-01), Ward et al.
patent: 2007/0158555 (2007-07-01), Ward et al.
patent: 2007/0158556 (2007-07-01), Ward et al.
patent: 2007/0158557 (2007-07-01), Ward et al.
patent: 2007/0158558 (2007-07-01), Ward et al.
patent: 2007/0158580 (2007-07-01), Ward et al.
patent: 2007/0158581 (2007-07-01), Ward et al.
patent: 2007/0158582 (2007-07-01), Ward et al.
patent: 2007/0187621 (2007-08-01), Ward et al.
patent: 2007/0194226 (2007-08-01), Ward et al.
patent: 2007/0194251 (2007-08-01), Ward et al.
patent: 2007/0205375 (2007-09-01), Ward et al.
patent: 2007/0210250 (2007-09-01), Ward et al.
patent: 2007/0210251 (2007-09-01), Ward et al.
patent: 2007/0215802 (2007-09-01), Ward et al.
patent: 2007/0227883 (2007-10-01), Ward et al.
patent: 2007/0228287 (2007-10-01), Ward et al.
patent: 2008/0067408 (2008-03-01), Winkler
patent: 2008/0217555 (2008-09-01), Ward et al.
patent: 196 04 272 (1996-08-01), None
patent: 197 15 226 (1998-10-01), None
patent: 197 44 126 (1999-04-01), None
patent: 0 317 952 (1989-05-01), None
patent: 0 427 532 (1991-05-01), None
patent: 0 477 992 (1992-04-01), None
patent: 1 491 654 (2004-12-01), None
patent: 1 655 265 (2006-05-01), None
patent: 2 031 633 (2009-03-01), None
patent: 2244257 (1975-04-01), None
patent: 1 604 898 (1981-12-01), None
patent: 55-126949 (1980-10-01), None
patent: 5209844 (1983-12-01), None
patent: 62 051134 (1987-03-01), None
patent: 63 040241 (1988-02-01), None
patent: 63 045740 (1988-02-01), None
patent: 63 200434 (1988-08-01), None
patent: 1-130450 (1989-05-01), None
patent: 02 087440 (1990-03-01), None
patent: 03-214554 (1991-09-01), None
patent: 04 341734 (1992-11-01), None
patent: 04 341743 (1992-11-01), None
patent: 5275050 (1993-10-01), None
patent: 05-297146 (1993-11-01), None
patent: 07045230 (1995-02-01), None
patent: 2789610 (1995-08-01), None
patent: 07-272652 (1995-10-01), None
patent: 2001 176440 (2001-06-01), None
patent: 02 025488 (2002-01-01), None
patent: 2003 302579 (2003-10-01), None
patent: 98/47172 (1998-10-01), None
patent: 01/04611 (2001-01-01), None
patent: WO 2004/015496 (2004-02-01), None
patent: 2004/068538 (2004-08-01), None
patent: 2006/133241 (2006-12-01), None
Bernatskii and Pavlov, “Field Desorption of a Potassium-Gold Film on Tungsten,” Physics of the Solid State, 46(8):1538-1541, 2004.
Boerret et al., “Long time current stability of a gas filed ion source with a supertip,” J. Phys. D. Appl. Phys. 21(12):1835-1837, 1988.
Giannuzzi and Stevie,Introduction to Focused Ion Beams—Instrumentation, Theory, Techniques and Practice, Nov. 2004, Springer, XP002442742, Chapter 3, see especially p. 56, second section.
Giannuzzi and Stevie,Introduction to Focused Ion Beams—Instrumentation, Theory, Techniques and Practice, Nov. 2004, Springer, XP002462691, Chapter 5—Device Edits and Modifications.
Golubev et al., “Field Emission Study of the Growth of Close-Packed and Stepped Surfaces of a Tungsten Single Crystal,” J. Crystal Growth 52:48-52, 1981.
Hiroshima et al., “A focused He+ ion beam with a high angular current density,” Jpn. J. Appl Phys., 31(1)(12B):4492-4495, 1992.
Kuo et al., “Noble Metal/W(111) Single-Atom Tips and Their Field Electron and Ion Emission Characteristics,” Jpn. J. App. Phys., 45(11):8972-8983, 2006.
Kubena et al., “A low magnification focused ion beam system with 8 nm spot size,” J. Vac. Sci. Technol., 9(6):3079-3083, 1991.
Liu and Orloff, “Analytical model of a gas phase filed ionization source,” J. Vac. Sci. Technol. B 23(6):2816-2820, 2005.
Melngailis, “Focused ion beam Lithography”, Nuclear Instr. And Methods in Phys. Res. B80(81):1271-1280, 1993.
Pavlov, “Atomically Sharp <111> Trihedral Angle of a Tungsten Tip,” Physics of a Solid State, 49(8):1579-1582, 2007.
Pavlov, “Field-Desorption Microscopy Study of the Deformation of a Tungsten Tip Subjected to Thermal Treatment in an Electric Field,” Physics of the Solid State, 47(11):2180-2185, 2005.
Pavlov, “Field Desorption Microscopy of the <111> Trihedral Angle of a Reconstructed Tungsten Tip,” Technical Physics, 51(9):1210-1214, 2006.
Pavlov, “Observation of the Drawing out of Needles by Electric Fields,” A translation of JETP Pis'ma v Redaktsiyu of the Academy of Sciences of the USSR, 17(5):177-179, 1973.
Pavlov, “Variations in Shapes of Outgrowths on a Tungsten Tip during Growth in an Electric Field,” Physics of a Solid State, 48(5):969-972, 2006.
Sakai et al., “Contrast mechanisms in scanning ion microscope imaging for metals,” App. Phys. Letters, AIP, vol. 73, No. 5, pp. 611-613, Aug. 3, 1998.
Sakata et al., “Helium field ion source for application in a 100 keV focused ion beam system,” J. Vac. Sci. Technol. B 10(6):2842-2845, 1992.
Sendecki and Barwinski, 

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