Optical measurement apparatus utilizing total reflection

Details Optical measurement apparatus utilizing total reflection Optical measurement apparatus utilizing total reflection

2008-08-19

2009-08-04

Punnoose, Roy (Department: 2886)

Optics: measuring and testing

Of light reflection

C356S128000

Reexamination Certificate

active

07570362

ABSTRACT:
In optical measurement utilizing total reflection, various types of measurement are selectively performed. The invention provides an optical measurement apparatus using total reflection, including a light source, a measurement optical system, and a light detector. The measurement optical system is an infinity-corrected positive lens formed of an optical member having a planar surface orthogonal to an optical axis of the measurement optical system at a front focal position. One side of the optical axis of the measurement optical system is used as a projection optical system for radiating measurement light onto a specimen, and another side is used as a photometric optical system for acquiring reflected light from the specimen. The light source is disposed at an entrance pupil position on the projection optical system side or at a position conjugate to the entrance pupil position and moves in an entrance pupil plane or in a plane conjugate to the entrance pupil position, along a straight line orthogonal to the optical axis, while a distance from the optical axis is detected. The light detector is disposed at an exit pupil position on the photometric optical system side or at a position conjugate to the exit pupil position. The optical-measurement apparatus comprises a light-source changing unit configured to change the position or shape of the light source.

REFERENCES:
patent: 5491556 (1996-02-01), Stewart et al.
patent: 6088115 (2000-07-01), Ohsaki et al.
patent: 6215549 (2001-04-01), Suzuki et al.
patent: 2006/0001884 (2006-01-01), Tani et al.
patent: 10-48130 (1998-02-01), None
patent: 2005-337940 (2005-12-01), None
patent: 2006-17648 (2006-01-01), None

Affiliated with

Also associated with

Rating

Optical measurement apparatus utilizing total reflection does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical measurement apparatus utilizing total reflection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical measurement apparatus utilizing total reflection will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4125128