Phase shifter for laser annealing

Details Phase shifter for laser annealing Phase shifter for laser annealing

2006-03-20

2009-08-18

Rosasco, Stephen (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

07575834

ABSTRACT:
An object of the present invention is to provide a phase shifter for laser annealing which is capable of effectively preventing the sticking of particles. A first layer and a third layer are made of quartz glass, and a two-dimensional pattern of fine grooves is formed in the surfaces of the layers. The first layer and the third layer are arranged so that a second layer is sandwiched between the layers in a state in which the surfaces provided with the grooves face each other. A peripheral edge portion of the first layer is laminated on that of the third layer by a spacer. The second layer is made of an inactive gas introduced between the first layer and the third layer.

REFERENCES:
patent: 6987035 (2006-01-01), Yamamoto et al.
patent: 7101436 (2006-09-01), Taniguchi et al.
patent: 10-144594 (1998-05-01), None
patent: 2000-228354 (2000-08-01), None
patent: 2003-68621 (2003-03-01), None
patent: 2004-259756 (2004-09-01), None
patent: 2005-86092 (2005-03-01), None

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