Piezoelectric actuator, liquid transporting apparatus, and...

Details Piezoelectric actuator, liquid transporting apparatus, and... Piezoelectric actuator, liquid transporting apparatus, and...

2007-07-16

2009-10-27

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S330000, C310S348000

Reexamination Certificate

active

07608983

ABSTRACT:
A piezoelectric actuator includes a piezoelectric layer, a vibration plate, a supporting member which has an relief portion. A thin wall portion is provided in a first area, of one of the piezoelectric layer and vibration plate, facing one end portion in a longitudinal direction of the relief portion. A thickness of the thin wall portion is smaller than a thickness of areas, of one of the piezoelectric layer and vibration plate, facing the central portion and one end portion in a width direction of a pressure chamber, respectively. This makes it possible to provide a piezoelectric actuator which is capable of increasing an amount of displacement of the vibration plate.

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