Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Assembly of plural semiconductive substrates each possessing...
Reexamination Certificate
2008-08-06
2009-11-24
Lee, Hsien-ming (Department: 2823)
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
Assembly of plural semiconductive substrates each possessing...
C438S409000, C438S455000, C438S458000, C257SE21568
Reexamination Certificate
active
07622330
ABSTRACT:
A method of fabricating composite substrates by associating a plurality of transfer layers in spaced relation upon a single intermediate support; providing a support layer on each transfer layer to form a composite substrate; and detaching the composite substrates from the intermediate support. The support layer is made of a deposited material that has a lower quality than that of the intermediate support. A bonding layer may be included on one of the intermediate support or the useful layer, or both, to facilitate bonding of the layers. The final substrates are useful in optic, electronic, or optoelectronic applications.
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Ghyselen Bruno
Letertre Fabrice
Lee Hsien-ming
S.O.I.Tec Silicon on Insulator Technologies
Winston & Strawn LLP
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