Semiconductor wafer having a dielectric reliability test...

Details Semiconductor wafer having a dielectric reliability test... Semiconductor wafer having a dielectric reliability test...

2006-04-27

2009-06-23

Hollington, Jermele M (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07550986

ABSTRACT:
A semiconductor wafer includes a dielectric test structure including a voltage line, a control line, and a plurality of test devices connected in parallel to the voltage line and the control line. Each test device includes a voltage-controlled resistor connected to the control line and a dielectric device, the dielectric device being connected to the voltage line via the voltage-controlled resistor. A method for dielectric reliability testing and forming an integrated circuit product is also provided, as is a wafer with a control voltage pad and an integrated circuit product.

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