Method of making a piezoelectric device

Details Method of making a piezoelectric device Method of making a piezoelectric device

2006-02-24

2009-12-29

Trinh, Minh (Department: 3729)

Metal working

Piezoelectric device making

C029S025410, C029S025420, C029S830000, C029S846000, C310S311000, C310S31300R, C333S187000

Reexamination Certificate

active

07636994

ABSTRACT:
The present invention provides an electronic device with improved characteristics and a method of making the electronic device. In a method of making an electronic device (piezoelectric device)74according to the present invention, an outer edge R1of a piezoelectric film52A formed on an electrode film46A of a laminate60is located inside an outer edge R2of the electrode film46A. For this reason, in removal of a monocrystalline Si substrate14from a multilayer board61, where an etching solution permeates between polyimide72and laminate60, the etching solution circumvents the electrode film46A before it reaches the piezoelectric film52A. Namely, a route A of the etching solution to the piezoelectric film52A is significantly extended by the electrode film46A. In the method of making the electronic device74, therefore, the etching solution is less likely to reach the piezoelectric film52A. It significantly suppresses a situation of dissolution of the piezoelectric film52A and realizes improvement in characteristics of the piezoelectric device74made.

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