Plastic article or earthenware shaping or treating: apparatus – With indicator – signal – recorder – illuminator – or inspection... – For determining – observing – or recording position of...
Reexamination Certificate
2006-05-25
2009-11-17
Gupta, Yogendra (Department: 1791)
Plastic article or earthenware shaping or treating: apparatus
With indicator, signal, recorder, illuminator, or inspection...
For determining, observing, or recording position of...
C425S385000
Reexamination Certificate
active
07618250
ABSTRACT:
An imprint lithography apparatus is disclosed that has a template holder configured to hold an imprint template, a substrate table, and an optical encoder, the optical encoder having a radiation output, a first diffraction grating, and a detector, the radiation output arranged to illuminate a second diffraction grating and the detector positioned to detect radiation diffracted by the first and second diffraction gratings to provide an alignment signal.
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Kolesnychenko Aleksey Yurievich
Kruijt-Stegeman Yvonne Wendela
Van Santen Helmar
ASML Netherlands B.V.
Gupta Yogendra
Nguyen Thu Khanh T
Pillsbury Winthrop Shaw & Pittman LLP
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