Surface inspection method and apparatus

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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Details

C348S125000

Reexamination Certificate

active

07616803

ABSTRACT:
There have been disclosed a surface inspection method and a surface inspection apparatus for inspecting the surface of an article, the surface being almost flat and continuous and having non-flat parts with convex shapes and concave shapes provided based on specifications, capable of inspecting for defective parts in the non-flat parts without detecting the non-flat parts as defective parts. The surface inspection apparatus comprises an image pickup device, a correction data calculation unit for calculating non-flat part correction data for making the image of the non-flat part into one equivalent to the image of the flat part based on the difference between the image of the non-flat part and the image of the flat part, a non-flat correction unit for correcting the image of the non-flat part based on the non-flat part correction data, and a defect detection unit for detecting defects on the article surface by processing the image of the article surface after correcting the image of the non-flat part.

REFERENCES:
patent: 4972493 (1990-11-01), Chemaly
patent: 5379347 (1995-01-01), Kato et al.
patent: 6295374 (2001-09-01), Robinson et al.
patent: 6-249792 (1994-09-01), None
patent: 6-76849 (1994-10-01), None
patent: 10-103938 (1998-04-01), None
patent: 2000-47369 (2000-02-01), None
patent: 2000-171403 (2000-06-01), None

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