Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive
Reexamination Certificate
2005-10-20
2009-10-13
Donovan, Lincoln (Department: 2832)
Electricity: magnetically operated switches, magnets, and electr
Electromagnetically actuated switches
Polarity-responsive
C200S181000
Reexamination Certificate
active
07602265
ABSTRACT:
The present invention provides multiple test structures for performing reliability and qualification tests on MEMS switch devices. A Test structure for contact and gap characteristic measurements is employed having a serpentine layout simulates rows of upper and lower actuation electrodes. A cascaded switch chain test is used to monitor process defects with large sample sizes. A ring oscillator is used to measure switch speed and switch lifetime. A resistor ladder test structure is configured having each resistor in series with a switch to be tested, and having each switch-resistor pair electrically connected in parallel. Serial/parallel test structures are proposed with MEMS switches working in tandem with switches of established technology. A shift register is used to monitor the open and close state of the MEMS switches. Pull-in voltage, drop-out voltage, activation leakage current, and switch lifetime measurements are performed using the shift register.
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patent: 6624720 (2003-09-01), Allison et al.
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Deligianni Hariklia
Edwards Robert D.
Fleischman Thomas J.
Groves Robert A.
Montrose Charles J.
Curcio Robert
DeLio & Peterson LLC
Donovan Lincoln
International Business Machines - Corporation
Jacklitsch Lisa U.
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