Solid immersion lens holder

Details Solid immersion lens holder Solid immersion lens holder

2004-06-29

2009-08-18

Sugarman, Scott J (Department: 2873)

Optical: systems and elements

Lens

With support

C359S811000, C359S813000, C359S822000

Reexamination Certificate

active

07576928

ABSTRACT:
An arrangement, equipped with a holder9, which supports a solid immersion lens3in the gravity direction with the bottom surface of solid immersion lens3being protruded downward through an opening9b, is provided. With this arrangement, when solid immersion lens3is set on an observed object, solid immersion lens3is put in a state in which it is raised by the observed object and is made free with respect to holder9. Also in this state, an excessive pressure will not be applied to the observed object and yet solid immersion lens3is put in close contact in conformance with the observed object and temperature drifts at the holder9side or the observed object side are cut off from the counterpart side and thus the influences of such temperature drifts are eliminated. A solid immersion lens holder, with which the damaging of the observed object can be eliminated and which enables high-precision observation, is thus provided.

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Arata, I. et al., “Photoemission and OBIRCH Analysis with Solid Immersion Lens (SIL)”, Conference Proceedings from the 29th International Symposium for Testing and Failure Analysis, ISTFA, Nov. 2-6, 2003, vol. 75, No. 4, Apr. 2004, pp. 325-329.
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