Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate
2008-05-02
2009-10-06
Coleman, W. David (Department: 2823)
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
C438S099000, C365S173000
Reexamination Certificate
active
07598097
ABSTRACT:
A magnetic data track used in a magnetic shift register memory system may be fabricated by forming a multilayered stack of alternating dielectric and/or silicon layers. A trench is etched in the multi-layer stack structure. A selective etching process is used to corrugate the walls of trench. A seed layer is applied to the walls and bottom of the trench; the seed layer is covered with a magnetic layer. The trench is filled with an insulating material. A patterned layer is applied and portions of insulating material exposed by the pattern are removed, forming holes. Magnetic material and seed layer exposed in holes is selectively removed. The holes are filled with insulating material and connecting leads are attached to data tracks.
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Chen Tze-chiang
Parkin Stuart S. P.
Coleman W. David
International Business Machines - Corporation
Kassatly Samuel A.
Kim Su C
Shimokaji & Associates P.C.
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