Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2005-03-25
2009-12-08
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603250, C029S603120, C360S123180, C360S123250, C360S123460
Reexamination Certificate
active
07627942
ABSTRACT:
A method for fabricating a magnetic write head with a coil with a high aspect ratio using a Chemical Vapor Deposition process such as Atomic Layer Deposition (ALD), High Speed ALD, Plasma Enhanced ALD (PEALD), Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD) to form encapsulating films over the coils without voids is disclosed. Materials which can be used for encapsulation include Al2O3, SiO2, AlN, Ta2O5, HfO2, ZrO2, and YtO3. The use of an ultra-conformal deposition process allows the pitch of the coils to be smaller than it is possible in the prior art. The method also allows materials with a smaller coefficient of thermal expansion than hardbake photoresist to be used with resulting improvements in thermal protrusion characteristics.
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Hsiao Richard
Jayasekara Wipul Pemsiri
Zolla Howard Gordon
Hitachi Global Storage Technologies - Netherlands B.V.
Knight G. Marlin
Tugbang A. Dexter
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