Surface acoustic wave device and fabrication method thereof

Details Surface acoustic wave device and fabrication method thereof Surface acoustic wave device and fabrication method thereof

2006-10-03

2009-12-08

SanMartin, Jaydi (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S31300R, C310S340000, C310S344000

Reexamination Certificate

active

07629729

ABSTRACT:
A surface acoustic wave device includes a piezoelectric substrate, a surface acoustic wave element composed of electrodes provided on the piezoelectric substrate and the piezoelectric substrate, a first seal resin portion provided on the piezoelectric substrate and having a cavity on the surface acoustic wave element, and an inorganic insulation film provided in contact with a surface of the piezoelectric substrate to surround the surface acoustic wave element.

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