Piezoelectric element, method of manufacturing the...

Details Piezoelectric element, method of manufacturing the... Piezoelectric element, method of manufacturing the...

2007-08-28

2009-10-20

Feggins, K. (Department: 2861)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S068000, C347S070000, C347S072000

Reexamination Certificate

active

07604331

ABSTRACT:
A piezoelectric element includes a lower electrode film formed on one surface of a substrate, a piezoelectric layer made of a piezoelectric material and disposed on the lower electrode film, and an upper electrode film disposed on the piezoelectric layer, in which the lower electrode film contains platinum, titanium, iridium, and oxygen, and the lower electrode film includes a first layer disposed on the substrate and containing platinum as a primary component, a second layer disposed on the first layer and containing titanium as a primary component, and a third layer disposed on the second layer and containing iridium as a primary component.

REFERENCES:
patent: 7479728 (2009-01-01), Murai et al.
patent: 2004/0104981 (2004-06-01), Fujii et al.
patent: 11-205898 (1999-07-01), None
patent: 2001-274472 (2001-10-01), None
patent: 2005-203477 (2005-07-01), None
patent: 99/45598 (1999-09-01), None

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