Electrostatic membranes for sensors, ultrasonic transducers...

Details Electrostatic membranes for sensors, ultrasonic transducers... Electrostatic membranes for sensors, ultrasonic transducers...

2004-11-30

2009-02-10

Pihulic, Dan (Department: 3662)

Communications, electrical: acoustic wave systems and devices

Signal transducers

Receivers

Reexamination Certificate

active

07489593

ABSTRACT:
A micro-machined ultrasonic transducer substrate for immersion operation is formed by a particular arrangement of a plurality of micro-machined membranes that are supported on a silicon substrate. The membranes, together with the substrate, form surface microcavities that are vacuum sealed to provide electrostatic cells. The cells can operate at high frequency and can cover a broader bandwidth in comparison with conventional piezoelectric bulk transducers.

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