Position-measuring device

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

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Details

C356S521000, C250S23700G

Reexamination Certificate

active

07573581

ABSTRACT:
A position-measuring device is for measuring the position of two objects that are movable relative to one another. The device includes a measuring graduation, which is connected to one of the two objects, as well as at least one scanning system for scanning the measuring graduation, which is connected to the other of the two objects. The scanning system is arranged to permit a simultaneous determination of the position values along at least one lateral and along one vertical shift direction of the objects.

REFERENCES:
patent: 4636076 (1987-01-01), Pettigrew
patent: 4776701 (1988-10-01), Pettigrew
patent: 5206704 (1993-04-01), Huber et al.
patent: 6351313 (2002-02-01), Braasch et al.
patent: 6922248 (2005-07-01), Steegmuller
patent: 0 163 362 (1985-12-01), None
patent: 0 448 982 (1991-10-01), None
patent: 1 019 669 (2000-07-01), None

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