Integrated optic devices and photosensitive sol-gel process...

Details Integrated optic devices and photosensitive sol-gel process... Integrated optic devices and photosensitive sol-gel process...

2007-10-16

2009-02-24

Font, Frank G (Department: 2883)

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

C385S014000, C385S017000

Reexamination Certificate

active

07496267

ABSTRACT:
A photosensitive sol-gel film containing an organometallic photosensitizer is deposited on the oxide containing surface layer of a silicon substrate. A pattern of white or ultra violet light incident to the photosensitive sol-gel film results in the unbinding of the photosensitizer from the exposed regions of the sol-gel film. A subsequent succession of first and second heating steps results in, first, the removal of the photo sensitizer constituents from the exposed regions of the sol-gel film and, second, the removal of the organic constituents from the exposed regions, resulting in regions doped with a metal oxide with non linear optical properties, such as semicondutive, etc. properties. Optical switches, couplers, waveguides, splitters, interferometers wavelength division multiplexer, Bragg gratings and more can be fabricated. A glass substrate also may be employed, instead of a silicon, in which case a separate silicon oxide surface layer is unnecessary.

REFERENCES:
patent: 6665014 (2003-12-01), Assadi et al.

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