Robot calibration system and method

Details Robot calibration system and method Robot calibration system and method

2006-11-17

2009-06-23

Tran, Khoi H. (Department: 3664)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Robot control

C700S218000, C700S255000, C700S258000, C700S259000, C414S754000, C414S757000, C414S777000, C414S783000, C414S816000, C318S568160, C318S640000, C901S016000, C901S047000, C073S856000, C073S866500, C198S394000

Reexamination Certificate

active

07551979

ABSTRACT:
A robot calibration system and method for robots in semiconductor wafer processing systems is disclosed. The calibration system comprises a calibration array, a dummy wafer and a control system programmed with a calibration routine. The calibration array has an plurality of inductive proximity sensors to determine parallelism of the robot relative to a station and a center locating sensor to determine the center of the station.

REFERENCES:
patent: 5535306 (1996-07-01), Stevens
patent: 6051286 (2000-04-01), Zhao et al.
patent: 6123766 (2000-09-01), Williams et al.
patent: 6189482 (2001-02-01), Zhao et al.
patent: 6549277 (2003-04-01), Narushima et al.
patent: 6822413 (2004-11-01), Simondet
patent: 6856863 (2005-02-01), Sundar
patent: 6934606 (2005-08-01), Genetti et al.
patent: 2005/0102064 (2005-05-01), Donoso et al.
International Search Report dated May 20, 2008 for PCT/US07/84882.
Written Opinion dated May 20, 2008 for PCT/US07/84882.

Affiliated with

Also associated with

Rating

Robot calibration system and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Robot calibration system and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Robot calibration system and method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4094680