Method of measuring micro-structure, micro-structure...

Details Method of measuring micro-structure, micro-structure... Method of measuring micro-structure, micro-structure...

2008-08-27

2009-08-25

Lee (Andrew), Hwa S (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S504000

Reexamination Certificate

active

07580134

ABSTRACT:
This invention provides a method and an apparatus of measuring a micro-structure, capable of evaluating a geometry of a micro-structure formed typically on the surface of a semiconductor substrate, in a non-destructive, easy, precise and quantitative manner. A reflection spectrum of a sample having a known dimension of a target micro-geometry is measured (A1), features (waveform parameters) which strongly correlate to a dimension of the measured micro-geometry are determined (A2), a relation between the dimension of the micro-geometry and the waveform parameters is found (A3), and a dimension of the micro-structure having an unknown dimension is finally determined using this relation and based on the reflection spectrum obtained therefrom (A4, A5).

REFERENCES:
patent: 4748329 (1988-05-01), Cielo et al.
patent: 5889592 (1999-03-01), Zawaideh
patent: 6639682 (2003-10-01), Neily et al.
patent: 7019844 (2006-03-01), Venugopal et al.
patent: 2008/0215271 (2008-09-01), Bankhead et al.
patent: 0 350 869 (1990-01-01), None
patent: 0 727 715 (1996-08-01), None
patent: 11-211421 (1999-08-01), None
patent: 2001-217291 (2001-08-01), None
European Search Report dated Jul. 22, 2008.

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