Method of and apparatus for measuring birefringence

Optics: measuring and testing – By polarized light examination

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Details

356 35, 356367, 250225, G01J 400, G01B 1118

Patent

active

054502004

ABSTRACT:
A part for projecting a measuring light beam onto a sample and a light receiving part are arranged on the same side of a sample surface so that the measuring light beam is concentric with the light receiving part, the measuring light beam which is converted to a linearly polarized light beam through a polarizing element is projected to the sample so that the measuring light beam outgoing from the sample to the projecting side is received and detected through the same polarizing element. A plurality of sets of polarizing elements and light receiving parts are set so that the polarizing elements have different polarization directions, to calculate retardation from transmitted light intensity levels as obtained.

REFERENCES:
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patent: 3885875 (1975-05-01), Rosenfeld et al.
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patent: 4749854 (1988-06-01), Martens
patent: 4801798 (1989-01-01), Lange
patent: 4948255 (1990-08-01), Watanabe
patent: 4973163 (1990-11-01), Sakai et al.

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