System and method of slurry treatment

Details System and method of slurry treatment System and method of slurry treatment

2005-08-02

2009-02-10

Barry, Chester T (Department: 1797)

Liquid purification or separation

Processes

Ion exchange or selective sorption

C210S688000, C210S748080, C210S757000

Reexamination Certificate

active

07488423

ABSTRACT:
Wastewater streams from semiconductor processing operations are treated to reduce the concentration therein of one or more metal species to a satisfactory level. The disclosed systems and technique utilize complexing ion exchange media to treat the wastewater streams having a significant concentration of oxidizing species.

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