Stereoscopic three-dimensional metrology system and method

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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C382S141000, C382S154000, C382S287000, C356S401000

Reexamination Certificate

active

07634128

ABSTRACT:
A stereoscopic three-dimensional optical metrology system and method accurately measure the location of physical features on a test article in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article from two or more perspectives through a substantially transparent fiducial plate bearing a fiducial marking; camera viewing angles and apparent relative distances between a feature on a test article and one or more fiducials may enable accurate calculation of feature position.

REFERENCES:
patent: 5537204 (1996-07-01), Woodhouse
patent: 6064756 (2000-05-01), Beaty et al.
patent: 6134975 (2000-10-01), Keil
patent: 6377701 (2002-04-01), Ohki
patent: 6728582 (2004-04-01), Wallack
patent: 2004/0233461 (2004-11-01), Armstrong et al.

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