Spatial wavefront analysis and 3D measurement

Details Spatial wavefront analysis and 3D measurement Spatial wavefront analysis and 3D measurement

2002-10-16

2009-10-27

Lee, Hwa S (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07609388

ABSTRACT:
A method of wavefront (100) analysis including applying a transform to the wavefront, applying a plurality of different phase changes (110, 112, 114) to the transformed wavefront (108), obtaining a plurality of intensity maps (130, 132, 134) wherein the plurality of different phase changes are applied to region of the transformed wavefront, corresponding to a shape of the light source.

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