Substrate-holding technique

Details Substrate-holding technique Substrate-holding technique

2007-07-27

2009-10-13

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S075000

Reexamination Certificate

active

07602476

ABSTRACT:
A substrate holding apparatus which contacts an undersurface of a substrate and holds the substrate, at least a portion of a top surface of the substrate being immersed in liquid. The apparatus includes a chuck unit for supporting the substrate, and a groove, arranged along an outer periphery of a substrate supporting surface of the chuck unit, for storing a fluorinated inert refrigerant, fluorinated oil or a gelatinous polymer material.

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Japanese Office Action dated Nov. 28, 2007, issued in corresponding Japanese patent application No. 2003-409446, with an English translation.
Japanese Office Action dated Apr. 4, 2007, issued in corresponding Japanese patent application No. 2003-409446, with English translation.

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